Optical measurements of line edge roughness

Details Optical measurements of line edge roughness Optical measurements of line edge roughness

2007-02-27

2007-02-27

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Dimension

Width or diameter

C356S600000

Reexamination Certificate

active

10513034

ABSTRACT:
A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of the structure, and further applying software and/or hardware utilities for deriving information representative of said line edge roughness parameter/s from said spectral response of the structure.

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patent: 6516528 (2003-02-01), Choo et al.
patent: 6539331 (2003-03-01), Fiekowsky
patent: 6697153 (2004-02-01), Wright et al.
patent: 6909791 (2005-06-01), Nikitin et al.
patent: 6976240 (2005-12-01), Chang
patent: 2002/0018217 (2002-02-01), Weber-Grabau et al.

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