4. Optics: measuring and testing
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Optical measurement of lithographic power bias of minimum...

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical measurements of line edge roughness

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical measuring device

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical metrology of single features

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical metrology of single features

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical modules and method of precisely assembling same

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical profilometry of additional-material deviations in a...

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Optical profilometry of additional-material deviations in a...

Optics: measuring and testing – Dimension – Width or diameter
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