Harmonically matched diffraction grating pair

Height scanning interferometer for determining the absolute...

Height scanning interferometry method and apparatus...

Helium- Neon laser light source generating two harmonically...

Heterodyne array detector

Heterodyne array detector

Heterodyne based optical spectrum analysis with controlled...

Heterodyne based optical spectrum analysis with reduced data...

Heterodyne beam delivery with active control of two...

Heterodyne frequency modulated signal demodulator and method...

Heterodyne interferometer device for optically measuring an...

Heterodyne interferometer with a phase modulated source

Heterodyne interferometer with angstrom-level periodic...

Heterodyne interferometry for small spacing measurement

Heterodyne laser interferometer for measuring wafer stage...

Heterodyne laser interferometer using heterogenous mode...

Heterodyne lateral grating interferometric encoder

Heterodyne optical network analysis that utilizes signal...

Heterodyne reflectometer for film thickness monitoring and...

Heterodyne reflectometer for film thickness monitoring and...