Heterodyne lateral grating interferometric encoder

Details Heterodyne lateral grating interferometric encoder Heterodyne lateral grating interferometric encoder

2005-05-24

2005-05-24

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S499000

Reexamination Certificate

active

06897961

ABSTRACT:
A heterodyne lateral grating interferometer having a laser signal received by an AOM which generates several defracted order beams including a zero order beam and higher order beams. A lens system reimages the defracted order beams onto a stationary phase grating. An RF drive signal is received by the AOM such that the spatial frequency of the traveling phase grating of the AOM is responsive to the frequency of the RF drive signal, and the optical phase modulation depth of the traveling phase grating is responsive to the power of the RF drive signal. A phase detector determines the phase of the zero order beam from the stationary phase grating with respect to the phase of the RF drive signal.

REFERENCES:
patent: 3891321 (1975-06-01), Hock
patent: 3930734 (1976-01-01), Holly et al.
patent: 5663794 (1997-09-01), Ishizuka
patent: 6204926 (2001-03-01), Maznev et al.
patent: 6490390 (2002-12-01), Wilcox

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