Heterodyne array detector

Optics: measuring and testing – By light interference – Having light beams of different frequencies

Reexamination Certificate

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Reexamination Certificate

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11193999

ABSTRACT:
A method and apparatus for correcting an input beam (102) that uses an array of detectors (114) sensing a scanning fringe pattern to generate phase error information which can be corrected by a physically adjacent beam correction device such as an array of micro-electrical-mechanical-system (MEMS) mirrors (116).

REFERENCES:
patent: 4682025 (1987-07-01), Livingston et al.
patent: 5684545 (1997-11-01), Dou et al.
patent: 6498650 (2002-12-01), Davies
patent: 7027161 (2006-04-01), Pepper

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