Method and apparatus for measuring optical phase and amplitude

Method and apparatus for point diffraction interferometry

Method and device for measuring thin films and semiconductor...

Method for absolute calibration of an interferometer

Method for optical system coherence testing

Methods and apparatus for reducing error in interferometric...

Methods and apparatus for splitting, imaging, and measuring...

Methods and apparatus for splitting, imaging, and measuring...

Methods and system for optically correlating ultrashort...

Metrology apparatus, lithographic apparatus, process...

Metrology apparatus, lithographic apparatus, process...

Microinterferometer for measuring distance with improved...

Multi-channel grating interference alignment sensor

Multi-conjugate adaptive optics system for field conjugation

Non-etalon wavelength locking optical sub-assembly and...

Non-periodic wavefront dividing interferometer

On-chip phase microscope/beam profiler based on differential...

Optical interferometer and method

Optical lattice microscopy

Optical measuring apparatus and operating method for imaging...