4. Optics: measuring and testing
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Phase measurement apparatus for measuring characterization...

Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate

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Phase shifting grating-slit test for optical surface...

Optics: measuring and testing – By light interference – Having wavefront division
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Phase-shifting point diffraction interferometer mask designs

Optics: measuring and testing – By light interference – Having wavefront division
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Point diffraction interferometer and exposure apparatus and...

Optics: measuring and testing – By light interference – Having wavefront division
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Point diffraction interferometer with enhanced contrast

Optics: measuring and testing – By light interference – Having wavefront division
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Point diffraction interferometric mask inspection tool and...

Optics: measuring and testing – By light interference – Having wavefront division
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Polarization-dependent grating interferometer for measuring...

Optics: measuring and testing – By light interference – Having wavefront division
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