Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2005-09-06
2005-09-06
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
C356S499000
Reexamination Certificate
active
06940607
ABSTRACT:
In the case of a method for absolute calibration of an interferometer with the aid of a spherical output wave, comprising an optical element which retroflects the incident spherical wave itself or via a mirror, at least four measuring procedures are undertaken to determine a wave aberration W. The optical element is measured in the at least four measuring positions intrafocally and extrafocally in at least two different rotational angle positions. It is also possible, in addition, to undertake a measurement via a mirror in the cat's eye position (focus3).
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Schulz, G. et al. “Calibration of an Interferometer for Testing Cylindrical Surfaces”, Jun. 15, 1995, pp. 512-520.
(Optics Communications, North-Holland Publishing Co., Amsterdam, NI, Bd. 117, Nr. 5).
Freimann Rolf
Mayer Maximilian
Reichelt Stephan
Carl Zeiss SMT AG
Connolly Patrick
Wells St. John P.S.
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