Method for absolute calibration of an interferometer

Optics: measuring and testing – By light interference – Having wavefront division

Reexamination Certificate

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C356S499000

Reexamination Certificate

active

06940607

ABSTRACT:
In the case of a method for absolute calibration of an interferometer with the aid of a spherical output wave, comprising an optical element which retroflects the incident spherical wave itself or via a mirror, at least four measuring procedures are undertaken to determine a wave aberration W. The optical element is measured in the at least four measuring positions intrafocally and extrafocally in at least two different rotational angle positions. It is also possible, in addition, to undertake a measurement via a mirror in the cat's eye position (focus3).

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Schulz, G. et al. “Calibration of an Interferometer for Testing Cylindrical Surfaces”, Jun. 15, 1995, pp. 512-520.
(Optics Communications, North-Holland Publishing Co., Amsterdam, NI, Bd. 117, Nr. 5).

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