Metrology apparatus, lithographic apparatus, process...

Details Metrology apparatus, lithographic apparatus, process... Metrology apparatus, lithographic apparatus, process...

2008-07-22

2008-07-22

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

C356S497000

Reexamination Certificate

active

07403293

ABSTRACT:
A metrology apparatus for measuring a parameter of a microscopic structure on a substrate, the apparatus comprising a supercontinuum light source arranged to generate a measurement beam, an optical system arranged to direct the measurement beam onto the substrate and a sensor for detecting radiation reflected and/or diffracted by the structure.

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