Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2005-11-08
2005-11-08
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
Reexamination Certificate
active
06963408
ABSTRACT:
A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit101, 102, allowing a light flux composed of the spherical wave to pass through a test sample109, thereafter dividing the light flux into two light fluxes by using an optical path-dividing element105, allowing one light flux of the divided light fluxes to pass through a pinhole129to covert the one light flux into a reference light beam which is a substantially ideal spherical wave, and detecting interference fringes generated by causing interference between the reference light beam and a measuring light beam which is the other light flux of the divided light fluxes. The wavefront aberration of the test sample can be measured by observing the interference fringes without being affected by the disturbance which would be otherwise caused by any system vibration or the like.
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Fukutomi Yasushi
Ichihara Yutaka
Ishii Mikihiko
Kawakami Jun
Shiozawa Hisashi
Nikon Corporation
Oliff & Berridg,e PLC
Smith Zandra V.
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