Micro swivel actuators and a procedure for the production of the
Micro thin-film structure, MEMS switch employing such a...
Micro-displays
Micro-dynamic optical device
Micro-electro mechanical device, micro-electro mechanical...
Micro-electro mechanical device, micro-electro mechanical...
Micro-electro mechanical light modulator device
Micro-electro mechanical light modulator device
Micro-electro mechanical light modulator device
Micro-electro-mechanical system device and method of making...
Micro-electro-mechanical systems and photonic interconnects...
Micro-electro-mechanical systems element array device and...
Micro-electro-mechanical-system two dimensional mirror with...
Micro-electro-mechanical-system two dimensional mirror with...
Micro-electromechanical based bistable color display sheets
Micro-electromechanical devices and methods of manufacture
Micro-electromechanical light modulator with anamorphic optics
Micro-electromechanical system
Micro-electromechanical system (mems) polyelectrolyte gel...
Micro-electromechanical system (MEMS) polyelectrolyte gel...