Micro-electromechanical system (MEMS) polyelectrolyte gel...

Details Micro-electromechanical system (MEMS) polyelectrolyte gel... Micro-electromechanical system (MEMS) polyelectrolyte gel...

2007-05-01

2007-05-01

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Having particular chemical composition or structure

C359S321000, C359S290000

Reexamination Certificate

active

10859561

ABSTRACT:
According to embodiments of the present invention, a first layer of electrically conductive material may be disposed in a recess in a micro-electromechanical system (MEMS) base. An electrically charged gel network may be disposed in the recess on the first layer of electrically conductive material. A second layer of electrically conductive material may be disposed in the recess on the cross-linked co-polymer gel network. A functionalizer may be disposed on the first and the second layers of electrically conductive material.

REFERENCES:
patent: 5250167 (1993-10-01), Adolf et al.
patent: 5389222 (1995-02-01), Shahinpoor
patent: 5739946 (1998-04-01), Iwanaga et al.
patent: 5854083 (1998-12-01), Chu et al.
patent: 6381061 (2002-04-01), Levola
patent: 6522452 (2003-02-01), Wood
patent: 6950227 (2005-09-01), Schrader
patent: 7034415 (2006-04-01), Turner et al.

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