Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-09-21
2010-06-29
Mack, Ricky L (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C310S309000
Reexamination Certificate
active
07746536
ABSTRACT:
A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.
REFERENCES:
patent: 5893948 (1999-04-01), Nickel et al.
patent: 6538798 (2003-03-01), Miller et al.
patent: 6563106 (2003-05-01), Bowers et al.
patent: 6642593 (2003-11-01), Lin et al.
patent: 6707593 (2004-03-01), Le et al.
patent: 7099060 (2006-08-01), Nanjyo et al.
patent: 7259940 (2007-08-01), Tanaka et al.
patent: 7507663 (2009-03-01), Shepard
patent: 7601270 (2009-10-01), Unger et al.
patent: 2002/0027487 (2002-03-01), Suzuki
patent: 2003/0042117 (2003-03-01), Ma
patent: 2004/0012838 (2004-01-01), Huibers
patent: 2005/0122560 (2005-06-01), Sampsell et al.
patent: 2004-261884 (2004-09-01), None
Hong Seok-kwan
Jeon Byung-hee
Kim Che-heung
Kweon Soon-cheol
Lee Sang-hun
Mack Ricky L
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
Tra Tuyen Q
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