Micro-electro mechanical device, micro-electro mechanical...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S290000, C359S291000, C359S292000, C359S298000, C359S315000, C359S224200, C345S085000, C345S108000, C348S770000, C348S771000

Reexamination Certificate

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11709028

ABSTRACT:
A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action forces to the movable portion to rotationally displace the movable portion in the second direction, which is different from the first direction, and the movable portion reaches a final displacement position. An elastic force value of the elastic supporting portion and the transition time have such a relationship that when the elastic force value of the elastic supporting portion is equal to a certain value, the transition time takes a local maximum value. The elastic force value of the elastic supporting portion is equal to or less than the certain value at which the transition time takes the local maximum value.

REFERENCES:
patent: 6618186 (2003-09-01), Kaeriyama
patent: 2006/0279496 (2006-12-01), Ogikubo et al.
patent: 2007/0002426 (2007-01-01), Ogikubo et al.
patent: 2007/0007849 (2007-01-01), Ogikubo et al.
patent: 2007/0024951 (2007-02-01), Mochizuki et al.
patent: 2007/0024952 (2007-02-01), Ogikubo et al.
patent: 2007/0121191 (2007-05-01), Pan
patent: 2007/0121192 (2007-05-01), Lee et al.
patent: 2007/0127110 (2007-06-01), Pan
patent: 2002-189178 (2002-07-01), None

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