Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-06-14
2005-06-14
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S224200, C359S850000, C359S295000, C345S084000, C438S052000, C438S066000, C310S306000
Reexamination Certificate
active
06906846
ABSTRACT:
A MEMS device and a method for making a MEMS device are described. The MEMS device includes a support member, an optical device, and a flexible member. In one aspect, the flexible member is formed separately from the support member and the optical device. In one aspect, the flexible member is dimensioned to enable flex in one direction while maintaining stiffness in two orthogonal directions. In one fabrication embodiment, the MEMS device is formed by etching an opening into the structural layer to create a structural support member and an optical device. The structural support member and optical device are mounted on a support substrate with a sacrificial layer. A flexible member is conformally deposited over the structural support member and the optical device and then etched. The sacrificial layer is partially etched away to leave the structural support member anchored to the support substrate.
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Cirelli Raymond A.
Liddle James A.
Schlax Michael P.
Agere Systems Inc.
Ben Loha
Dickstein , Shapiro, Morin & Oshinsky, LLP
Triquint Technology Holding Co.
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