Micro-electro-mechanical-system two dimensional mirror with...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S224200, C359S874000

Reexamination Certificate

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07095546

ABSTRACT:
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

REFERENCES:
patent: 4317611 (1982-03-01), Petersen
patent: 4662746 (1987-05-01), Hornbeck
patent: 4710732 (1987-12-01), Hornbeck
patent: 4956619 (1990-09-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5079545 (1992-01-01), Priem et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5105369 (1992-04-01), Nelson
patent: 5172262 (1992-12-01), Hornbeck
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5469302 (1995-11-01), Lim
patent: 5535047 (1996-07-01), Hornbeck
patent: 5543956 (1996-08-01), Nakagawa et al.
patent: 5579148 (1996-11-01), Nishikawa et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5661591 (1997-08-01), Lin et al.
patent: 5920417 (1999-07-01), Johnson
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6198565 (2001-03-01), Iseki et al.
patent: 6201629 (2001-03-01), McClelland et al.
patent: 6259548 (2001-07-01), Tsugai et al.
patent: 6315423 (2001-11-01), Yu et al.
patent: 6392220 (2002-05-01), Slater et al.
patent: 6431714 (2002-08-01), Sawada et al.
patent: 6454421 (2002-09-01), Yu et al.
patent: 6480320 (2002-11-01), Nasiri
patent: 6495893 (2002-12-01), Lin et al.
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6538799 (2003-03-01), McClelland et al.
patent: 6597828 (2003-07-01), Lee et al.
patent: 6690850 (2004-02-01), Greywall
patent: 6747786 (2004-06-01), Murakami et al.
patent: 6760144 (2004-07-01), Hill et al.
patent: 6778728 (2004-08-01), Taylor et al.
patent: 6781744 (2004-08-01), Aksyuk et al.
patent: 6822370 (2004-11-01), Clark et al.
patent: 6984917 (2006-01-01), Greywall et al.
patent: 2002/0012180 (2002-01-01), Yu et al.
patent: 2002/0071169 (2002-06-01), Bowers et al.
patent: 2002/0075554 (2002-06-01), Brophy et al.
patent: 2004/0212864 (2004-10-01), Greywall et al.
patent: 2429508 (2003-11-01), None
patent: 0902538 (1998-09-01), None
patent: 1197779 (2001-10-01), None
Thor Juneau, et al.; Single-Chip 1×84 MEMS Mirror Array for Optical Telecommunication Applications; Proceedings of SPIE, MOEMS and Miniaturized Systems III, Jan. 27-29, 2003, vol. 4983, pp. 53-64.
SOI MUMPS (http://www.memsrus.com/figs/soimumps.pdf) from Cronos (MEMScAP subsidiary).
Optical Networking, The Analog Devices Solutions Bulletin, Jan. 2002, Analog Devices at OFC 2002, Anaheim, CA, Booth 4975, Mar. 19-21.
IEEE Communications Magazine, Mar. 2002, vol. 40, No. 3.
Bergman, K., et al.; Micromachines for Optical-Layer Networking: What is their value and when will they deliver? Tellium. Contact: Evango@ieee.org, no date.
Lopez, D., et al.; Monolithic MEMS Optical Switch with Amplified Out-of-Plane Angular Motion; IEEE, 2002, pp. 165-166.
Garcia, Ernest J.; Pivoting Micromirror Designs for Large Orientation Angles; Proceedings SPIE 4178, pp. 126-136.
Kehr, Kersten, et al.; Analogously Working Micromirror Arrays; Part of the SPIE Conference on Miniaturized Systems with Micro-Optics and MEMS, Santa Clara, Sep. 1999, SPIE vol. 3878, pp. 80-89.
Giles, C.R. et al.; A Silicon MEMS Optical Switch Attenuator and Its Use in Lightwave Subsystems; IEEE Journal of Selected Topics in Quantum Electronics, vol. 5, No. 1, Jan./Feb. 1999, pp. 18-25.
Johanna I. Young, et al.; Comparative Study of 2-DOF Micromirrors for Precision Light Manipulation Spie Smart Structures and Materials Conference, Newport Beach, CA, Mar. 4-7, 2001.
Velijko Milanovic, et al.l Monolithic High Aspect Ratio Two-Axis Optical Scanners in SOI; 2003 Mems Conference, Kyoto, Japan, Jan. 19-23, 2003, pp. 255-258.
Sunghoon Kwon, et al.; Large-Displacement Vertical Microlens Scanner With Low Driving Voltage; IEEE Photonics Technology Letters, vol. 14, No. 11, Nov. 2002, pp. 1572-1574.
Horsley et al., Multi-Degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions; Solid State Sensor and Actuator Workshop, Hilton Head, Jun. 4-8, 2000, pp. 81-84.
B.M. Evans et al.; Finite Element Modeling of Micromachined Mems Photon Devices; Miniaturized Systems with Micro-optics and MEMIS, Santa Clara, Sep. 1999, SPIE 3878, pp. 253-260.
David Burns, et al.; Optical Bea, Steering Using Surface Micromachined Gratings and Optical Phased Arrays; Optical Scanning Systems; Design and Application, San Diego, CA, Jul. 1997, SPIE 3131, pp. 99-110.

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