Micro-electro-mechanical systems element array device and...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S224200, C359S295000, C359S298000, C345S085000, C345S108000, C348S770000, C348S771000

Reexamination Certificate

active

07446928

ABSTRACT:
A micro-electro-mechanical systems element array device in which plural micro-electro-mechanical systems elements each having a movable portion are arranged in an array, said movable portion being to be displaced by a physical force which is generated by applying an electric signal to a conductive portion, and each of said micro-electro-mechanical systems elements drives and displaces said movable portion of said micro-electro-mechanical systems element on the basis of a displacement data for said micro-electro-mechanical systems element, wherein said device comprises: an electric signal generating unit as defined herein; a switching unit as defined herein; and a selecting unit as defined herein.

REFERENCES:
patent: 2002/0051053 (2002-05-01), Kawai
patent: 6-124341 (1994-05-01), None
patent: 8-334709 (1996-12-01), None
patent: 10-48543 (1998-02-01), None
patent: 2000-28937 (2000-01-01), None

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