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6-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Afocal optical system and multibeam recording apparatus comprisi

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Afocal variation focusing system for mirrored optical systems

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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All-reflective zoom optical imaging system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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All-reflective zoom optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Apparatus and method to distort an optical beam to avoid...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Binary optic-corrected multistage imaging system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Broadband telescope

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Catadioptric imaging system employing immersion liquid for...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Catadioptric imaging system employing immersion liquid for...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Catadioptric imaging system with prolate spheroidal-shaped...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Catadioptric microlithographic reduction objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Utility Patent

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Catadioptric multi-functional optical assembly

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Catadioptric one-to-one telecentric image combining system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Catadioptric optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Catadioptric optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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