Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate
2007-12-05
2009-12-15
Fineman, Lee (Department: 2872)
Optical: systems and elements
Compound lens system
With curved reflective imaging element
C359S355000, C359S357000, C359S727000
Reexamination Certificate
active
07633675
ABSTRACT:
A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
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Armstrong J. Joseph
Chuang Yung-Ho
Shafer David R.
Fineman Lee
KLA-Tencor Technologies Corporation
Smyrski Law Group, A P.C.
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