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Re-imaging optical system including refractive and diffractive o

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reduction objective for extreme ultraviolet lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflecting optical imaging apparatus using spherical reflectors

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflecting optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflecting telescope including a flat apertured mirror rotatable

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective fly's eye condenser for EUV lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective optical system for a microscopic spectrometer

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective-type projection optical system and exposure...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflector telescope

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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