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Vacuum processing apparatus

Metal working – Barrier layer or semiconductor device making
Patent

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Vacuum processing system for producing components

Metal working – Barrier layer or semiconductor device making
Reexamination Certificate

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Vacuum wafer transport and processing system and method using a

Metal working – Barrier layer or semiconductor device making
Patent

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Vacuum/purge operation of loadlock chamber and method of...

Metal working – Barrier layer or semiconductor device making
Reexamination Certificate

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Vertical heat treatment apparatus having wafer transfer mechanis

Metal working – Barrier layer or semiconductor device making
Patent

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Vertical heat-treating apparatus

Metal working – Barrier layer or semiconductor device making – Barrier layer device making
Patent

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Vertical heat-treatment apparatus having boat transfer mechanism

Metal working – Barrier layer or semiconductor device making
Patent

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Vertical multi-process bake/chill apparatus

Metal working – Barrier layer or semiconductor device making
Patent

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Vertical processing apparatus

Metal working – Barrier layer or semiconductor device making
Patent

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Vertical wafer heat treatment apparatus having dual load lock ch

Metal working – Barrier layer or semiconductor device making
Patent

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