Metal working – Barrier layer or semiconductor device making
Patent
1997-01-23
1999-07-27
Graybill, David
Metal working
Barrier layer or semiconductor device making
118 50, H01L 2168, H01L 21027, B23P 2100, B65G 4907
Patent
active
059283904
ABSTRACT:
A processing apparatus comprises a plurality of process unit groups each including a plurality of process units for subjecting an object to a series of processes, the process units being arranged vertically in multiple stages, an object transfer space being defined among the process unit groups, and a transfer mechanism for transferring the object, the transfer mechanism having a transfer member vertically movable in the object transfer space, the transfer member being capable of transferring the object to each of the process units. The processing apparatus further comprises a mechanism for forming a downward air flow in the object transfer space, a mechanism for controlling the quantity of the downward air flow, and a mechanism for controlling the pressure in the object transfer space. Thus, a variation in condition of the object transfer space is reduced.
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Akimoto Masami
Iida Naruaki
Katano Takayuki
Kitano Junichi
Shinya Hiroshi
Graybill David
Tokyo Electron Limited
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