Micro-machined accelerometer with tilt compensation
Micro-machined angle-measuring gyroscope
Micro-machined mechanical structure and device incorporating...
Micro-machined multi-sensor providing 1-axis of acceleration...
Micro-machined multi-sensor providing 2-axes of acceleration...
Micro-machined suspension plate with integral proof mass for...
Micro-machined vibrating structure and associated...
Micro-machined vibrating structure and associated...
Micro-machining
Micro-mechanical inertial sensors
Micro-mechanical rate-of-rotation sensor with coupled structure
Micro-mechanical semiconductor accelerometer
Micro-miniature accelerometer
Microaccelerometer employing resonant circuit detection of seism
Microaccelerometer having low stress bonds and means for prevent
Microaccelerometer package with integral support braces
Microaccelerometer with temperature-compensated resonators
Microelectromechanical accelerometer with...
Microelectromechanical capacitive accelerometer and method of ma
Microelectromechanical dual-mass resonator structure