Micro-mechanical rate-of-rotation sensor with coupled structure

Details Micro-mechanical rate-of-rotation sensor with coupled structure Micro-mechanical rate-of-rotation sensor with coupled structure

1999-07-13

2000-09-19

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01C 1900

Patent

active

061195170

ABSTRACT:
Strictly out-of-phase stimulation of the two oscillators of a micro-mechanical rate-of-rotation sensor based on the Coriolis principle, having two-plate like oscillators arranged in layers one above another in two parallel planes and capable of being stimulated to oscillate perpendicular to the planes by means of an electrostatic drive, is achieved by the oscillators each being connected via at least one spring to a couple element formed, in each case, in the same wafer layer. The couple elements are mirror-symmetrically configured with respect to a mid-plane between the oscillators and connected to each other by a coupling web arranged therebetween to form a couple structure for the oscillators.

REFERENCES:
patent: 5959206 (1999-09-01), Ryrko et al.

Affiliated with

Also associated with

Rating

Micro-mechanical rate-of-rotation sensor with coupled structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-mechanical rate-of-rotation sensor with coupled structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-mechanical rate-of-rotation sensor with coupled structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1060829