Microaccelerometer with temperature-compensated resonators

Details Microaccelerometer with temperature-compensated resonators Microaccelerometer with temperature-compensated resonators

1995-05-19

1996-10-22

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73497, G01P 1510

Patent

active

055678793

ABSTRACT:
A resonator microaccelerometer sensitive to accelerations along a first direction is formed from a thin plate whose plane comprises the first direction and a second direction perpendicular to the first direction and that is orthogonal with a third direction. The microaccelerometer comprises a fixed frame; a seismic mass; two hanging legs; and two resonator beams. The hanging legs extend substantially along the second direction, each leg being directed toward the center of gravity of the mass, symmetrically with respect to this center; the resonator beams are parallel, but non collinear, and are symmetrical with respect to the center of gravity of the mass.

REFERENCES:
patent: 4398417 (1983-08-01), Shutt
patent: 5005413 (1991-04-01), Novack et al.
patent: 5186053 (1993-02-01), Egley et al.
patent: 5261277 (1993-11-01), Thomas et al.

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