Micro-machined vibrating structure and associated...

Details Micro-machined vibrating structure and associated... Micro-machined vibrating structure and associated...

2008-07-29

2008-07-29

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C331S154000

Reexamination Certificate

active

10582344

ABSTRACT:
The invention relates to a micro-machined, vibrating structure (4), comprising a fixing end (5), connected to a fixed support (6) and a hollow shell, preferably in a cylindrical form with a lateral wall (7), forming a vibrating wall (7) of the vibrating structure (4), in which progressive or stationary waves are generated. The hollow shell comprises a base (8), forming the fixing end (5) for the vibrating structure (4) and a free end (9). A naturally decoupled region is arranged between the fixing end (5) and the free end (9) of the hollow shell.

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Maenaka et al.; “A study of silicon angular rate sensors using anisotropic etching technology”;Sensors and Actuators; vol. A43; No. 1/3; May 1, 1994; pp. 72-77.

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