Microgyroscope with two resonant plates
Microgyroscope with vibratory structure having a multitude of gr
Micromachined acceleration and coriolis sensor
Micromachined acceleration and coriolis sensor
Micromachined apparatus utilizing box suspensions
Micromachined apparatus with drive/sensing fingers in...
Micromachined apparatus with split vibratory masses
Micromachined device with rotationally vibrated masses
Micromachined device with rotationally vibrated masses
Micromachined devices
Micromachined devices
Micromachined devices and connections over a substrate
Micromachined devices with anti-levitation devices
Micromachined devices with apertures
Micromachined devices with stop members
Micromachined double tuning-fork gyrometer with detection in...
Micromachined double tuning-fork gyrometer with detection in...
Micromachined gyros
Micromachined gyros
Micromachined gyroscope