Micromechanical sensor
Micromechanical sensor and method for its production
Micromechanical sensor and method for operating the sensor
Micromechanical sensor and method for producing the same
Micromechanical sensor element
Microscopic size, thermal conductivity type, air or gas absolute
Microstructures comprising silicon nitride layer and thin...
Microsystem with a flexible membrane pressure sensor
Microvacuum sensor having an expanded sensitivity range
Miniature electronic pressure gauge
Miniature fiber optic pressure sensor
Miniature gauge pressure sensor using silicon fusion bonding and
Miniature gauge pressure sensor using silicon fusion bonding...
Miniature hydrostat fabricated using multiple microelectromechan
Miniature optically coupled electrically isolated...
Miniature optically coupled electrically isolated...
Miniature pressure sensor and pressure sensor arrays
Miniature pressure sensor and pressure sensor arrays
Miniature pressure transducer
Miniature silicon based thermal vacuum sensor and method of meas