Microvacuum sensor having an expanded sensitivity range

Details Microvacuum sensor having an expanded sensitivity range Microvacuum sensor having an expanded sensitivity range

1994-12-21

1997-01-28

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Electrical

73708, G01L 2112

Patent

active

055979572

ABSTRACT:
A microvacuum sensor has an expanded sensitivity range, wherein a thin membrane having poor thermal conductivity is freely suspended on a semiconductor single-crystal. A thin metallic heating layer, preferably of aluminum, is arranged on the membrane. The membrane surface is suspended by at least one web of the membrane material. The heating layer has an extremely low emissivity of less than 0.1 in the near infrared range. A film resistor having the same temperature coefficient as the metallic heating layer is arranged on the sensor chip in the region of the solid silicon for temperature compensation of temperature fluctuations. Members having a planar mirrored wall are arranged parallel to the surfaces of the membrane at a spacing of less than 5 .mu.m from the membrane. These members act as a heat sink relative to the membrane. Gas from the environment of the sensor can freely circulate between the membrane and the wall surfaces.

REFERENCES:
patent: 5347869 (1994-09-01), Shie et al.
"A suspended disk vacuum gauge", A. R. Beavitt et al, Journal of Scientific Instruments (Journal of Physics E) 1968 Series 2, vol. 1, pp. 45-51.
"Multifoil thermocouple Gauge for Measuring Pressures up to 1 atm", W. P. Teagan, Review of Scientific Instruments, vol. 39, No. 12, Dec. 1968, pp. 1897-1898.
"Double-beam integrated thermal vacuum sensor", A. W. van Herwaarden et al, Journal of American Vacuum Society Technology, vol. 5, No. 4, Jul./Aug. 1987, pp. 2454-2457.
"Performance of integrated thermopile vacuum sensors", A. W. van Herwaarden et al, in Phys. E. Sci. Instr. 21, (1988), pp. 1162-1167.

Affiliated with

Also associated with

Rating

Microvacuum sensor having an expanded sensitivity range does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microvacuum sensor having an expanded sensitivity range, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microvacuum sensor having an expanded sensitivity range will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-942531