Miniature silicon based thermal vacuum sensor and method of meas

Details Miniature silicon based thermal vacuum sensor and method of meas Miniature silicon based thermal vacuum sensor and method of meas

1994-09-13

1996-09-24

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Mounting and connection

73755, G01L 700, G01L 2112

Patent

active

055579728

ABSTRACT:
A miniaturized silicon based thermally controlled vacuum sensor uses thin film resistors on a membrane in a minute measuring chamber to accurately detect vacuum pressures in the range of 760 Torr to 1.times.10.sup.-5 Torr. The configurations of the measuring chamber and gas diffusion port of the sensor structure insure that heat transfer from the membrane is predominately conductive over the pressure detection range to provide linear output up to 0.1 Torr. A microprocessor is used to control and measure power required to maintain a predetermined temperature differential between a sensing resistive element on the membrane and an ambient temperature sensing element of the sensor base from analog voltage and current values. Pressure detection errors introduced by ambient temperature variations are minimized by measuring power dissipated into the gas. Analog and digital converters for both current and voltage signals use a .SIGMA.-.DELTA. conversion method to reject electrical noise by an averaging technique to produce stable signal detection of pressure down to 1.times.10.sup.-5 Torr. The sensor is thermally stable over an ambient temperature range of 0.degree.-50.degree. C. at pressures between 10.sup.-4 to 760 Torr.

REFERENCES:
patent: 4320664 (1982-03-01), Rehn et al.
patent: 4729242 (1988-03-01), Reich et al.
patent: 4902138 (1990-02-01), Goeldner et al.
patent: 5108193 (1992-04-01), Furubayashi
Mannesmann Hartmann & Braun Prouct Information Sensor Technolgy "VPSO 28 Vacuum Prssure Sensor" Oct 1990.

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