Microscopic size, thermal conductivity type, air or gas absolute

Details Microscopic size, thermal conductivity type, air or gas absolute Microscopic size, thermal conductivity type, air or gas absolute

1986-05-16

1987-07-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Electrical

73204, 338318, 357 55, G01L 2112

Patent

active

046825037

ABSTRACT:
A microscopic size absolute pressure sensor for air or gas of the thermal conductivity type, a silicon nitride covered silicon microchip has an elongated V-groove anisotropically etched in the silicon with a heated silicon nitride bridge element extending over the surface of the V-groove.

REFERENCES:
patent: 3359462 (1967-12-01), Schutze et al.
patent: 4343768 (1982-08-01), Kimura
patent: 4389429 (1983-06-01), Soclof
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4542650 (1985-09-01), Renken et al.
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4549433 (1985-10-01), Gneiss et al.
patent: 4624137 (1986-11-01), Johnson et al.

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