Micromechanical sensor

Details Micromechanical sensor Micromechanical sensor

2007-05-08

2007-05-08

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Piston

Reexamination Certificate

active

10958014

ABSTRACT:
A micromechanical sensor, and a method for manufacturing a micromechanical sensor, featuring, in addition to a sensor element, at least a part of an evaluation circuit. In this context, the micromechanical sensor contains at least a first structural element made of a first material. The first structural element houses at least one sensor region and a part of an evaluation circuit, at least one sensor element being located in the sensor region. Moreover, at least one first and one second side are to be distinguished from one another in the first structural element. The first side of the first structural element features at least the sensor element, while the second side of the first structural element features at least a part of the evaluation circuit. At least parts of the sensor region and/or of the evaluation circuit are formed from the first material by micromechanical processing.

REFERENCES:
patent: 6624505 (2003-09-01), Badehi
patent: 6898972 (2005-05-01), Bauer et al.
patent: 19847455 (2000-04-01), None
patent: 100 42 945 (2002-03-01), None
patent: 1228998 (2002-08-01), None
patent: WO 02/076880 (2002-10-01), None
patent: WO2003/054938 (2003-07-01), None

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