Microfabricated implantable wireless pressure sensor for use...

Microfluidic measuring tool to measure through-silicon via...

Micromechanical component and equalization method

Micromechanical component having a sealed cavity and at...

Micromechanical component protected from environmental...

Micromechanical sensor and method for its production

Micromechanical sensor and method for producing the same

Microscopic size, thermal conductivity type, air or gas absolute

Microstructures comprising silicon nitride layer and thin...

Microvacuum sensor having an expanded sensitivity range

Miniature pressure transducer

Multi-channel pressure sensing apparatus

Multi-chip package

Multi-range pressure sensor apparatus and method utilizing a...