Micromachined capacitive RF pressure sensor

Micromachined differential pressure transducers

Micromachined integrated pressure sensor with oxide polysilicon

Micromechanical component and pressure sensor having a...

Micromechanical differential pressure sensor device

Micromechanical piezoresistive pressure sensor device

Micromechanical pressure sensor

Micromechanical pressure sensor system

Micromechanical sensor and method for operating the sensor

Micromechanical sensor element

Microsystem with a flexible membrane pressure sensor

Miniature gauge pressure sensor using silicon fusion bonding and

Miniature gauge pressure sensor using silicon fusion bonding...

Miniature hydrostat fabricated using multiple microelectromechan

Miniature optically coupled electrically isolated...

Miniature optically coupled electrically isolated...

Miniature pressure sensor and pressure sensor arrays

Miniature pressure sensor and pressure sensor arrays

Miniaturized membrane and shell for a pressure measuring sensor

Miniaturized membrane and shell for a pressure measuring sensor