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Loading apparatus having a suction-hold mechanism

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Loadlock apparatus and structure for creating a seal between...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Loadlock designs and methods for using same

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Local store for a wafer processing station

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Lock and elevator arrangement for loading workpieces into the wo

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Lock for the loading and/or discharging of bulk materials

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Lock for the transport of bulk material

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Long arm manipulator for standard mechanical interface apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Low shock transmissive antechamber seal mechanisms for vacuum ch

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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