4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching a multiple layered substrate where the etching...
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Mechanism for uniform etching by minimizing effects of etch rate

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Patent

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Method for etching low k dielectrics

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Method for etching platinum

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Patent

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Method for improving differential etching rate of a metallic lay

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Patent

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Method of etching a bond pad

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Patent

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Methods for etching borophosphosilicate glass

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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