4. Etching a substrate: processes
  5. Gas phase etching of substrate
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Selective etching processes of SiO 2 , Ti and In 2 O 3...

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Selective etching processes of SiO 2 , Ti and In 2 O 3...

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Selectively etching silicon using fluorine without plasma

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Self aligned contact etch using difluoromethane and trifluoromet

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Substrate processing method and substrate processing apparatus

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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