Apparatus for transmitting electric current by concentric channe
Arrangement for generating ions
Article comprising a casimir force modulator and methods...
Automatic discharge apparatus for residual charge on an...
Automotive air conditioning apparatus
Background recharging scorotron
Backside gas quick dump apparatus for a semiconductor wafer proc
Bar type ionizer
Barrier seal for electrostatic chuck
Bead or particle manipulating chucks
Bi-stable memory element
Bias-tracking D.C. power circuit for an electrostatic chuck
Billboard device
Bipolar carrier wafer and mobile bipolar electrostatic wafer...
Bipolar electrostatic chuck and method of making same
Board for ion generation and ion generating apparatus
Board for ion generation and ion generating apparatus
Bonding member and electrostatic chuck
Capacitive element driving apparatus
Cascaded gate-driven ESD clamp