Methods for controlling the elastic modulus of piezoelectric sub
Methods of depositing piezoelectric films
Micro actuator
Micro actuator having tilt and vertical displacement and...
Micro displacement mechanism and magnetic disk apparatus
Micro electrical mechanical system (MEMS) tuning using...
Micro electro mechanical system using comb and parallel...
Micro manipulator for movement of electrode, driving method...
Micro mechanical component and production process thereof
Micro motors and method for their fabrication
Micro movable device and method of making the same using wet...
Micro oscillating comb tooth element with two interesecting...
Micro oscillating element
Micro piezoelectric actuator and method for fabricating same
Micro position-control system
Micro stage using piezoelectric element
Micro-actuator
Micro-actuator
Micro-actuator and method of producing the same
Micro-actuator array, micro-actuator device, optical switch,...