Methods of depositing piezoelectric films

Details Methods of depositing piezoelectric films Methods of depositing piezoelectric films

2007-06-05

2007-06-05

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C029S025350

Reexamination Certificate

active

10817888

ABSTRACT:
This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially equal to the target thickness.

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