Micro movable device and method of making the same using wet...

Details Micro movable device and method of making the same using wet... Micro movable device and method of making the same using wet...

2009-05-06

2010-12-14

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000

Reexamination Certificate

active

07851976

ABSTRACT:
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

REFERENCES:
patent: 3360664 (1967-12-01), Straube
patent: 4641153 (1987-02-01), Cruz-Uribe
patent: 5437739 (1995-08-01), Hays
patent: 5525544 (1996-06-01), Kariyazono et al.
patent: 5578976 (1996-11-01), Yao
patent: 6307452 (2001-10-01), Sun
patent: 6584660 (2003-07-01), Shimogawa et al.
patent: 6635519 (2003-10-01), Barber et al.
patent: 7388319 (2008-06-01), Bibl et al.
patent: 7459827 (2008-12-01), Kawakubo et al.
patent: 2002/0046985 (2002-04-01), Daneman et al.
patent: 2002/0189062 (2002-12-01), Lin et al.
patent: 2003/0224551 (2003-12-01), Kim et al.
patent: 2005/0205514 (2005-09-01), Wu et al.
patent: 2005/0210988 (2005-09-01), Amano et al.
patent: 2006/0119221 (2006-06-01), Ikeda et al.
patent: 2006/0119227 (2006-06-01), Ikehashi
patent: 2006/0227489 (2006-10-01), Bunyan et al.
patent: 2007/0206300 (2007-09-01), Tanaka
patent: 2008/0074472 (2008-03-01), Takahashi
patent: 52-079654 (1977-04-01), None
patent: 07-074246 (1995-03-01), None
patent: 07-312361 (1995-11-01), None
patent: 09-017300 (1997-01-01), None
patent: 2001-143595 (2001-05-01), None
patent: 2002-043273 (2002-02-01), None
patent: 2002-246363 (2002-08-01), None
patent: 2007-504608 (2007-03-01), None
patent: WO2005/022575 (2005-03-01), None
USPTO, (Alanko) Non-Final Rejection, Jun. 12, 2008, in parent (section 121 priority) U.S. Appl. No. 11/376,114 [now issued].
USPTO, (Rosenau) Restriction Requirement, Dec. 26, 2007, in parent (section 121 priority) U.S. Appl. No. 11/376,114 [now issued].
USPTO, (Alanko) Notice of Allowance, Apr. 27, 2009, in parent (section 121 priority) U.S. Appl. No. 11/376,114 [now issued].

Affiliated with

Also associated with

Rating

Micro movable device and method of making the same using wet... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro movable device and method of making the same using wet..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro movable device and method of making the same using wet... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4168664