Micro position-control system

Details Micro position-control system Micro position-control system

2007-05-15

2007-05-15

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S328000

Reexamination Certificate

active

11193376

ABSTRACT:
A micro position-control system capable of more precisely controlling three degree-of-freedom motions, namely, a Z-direction motion and X-axis and Y-axis rotations. The micro position-control system includes a base including a plurality of base units disposed at equal angles from the center of a motion stage, holding piezo actuators parallel to a direction of the disposition of the base units, a plurality of bridge units disposed to face the base units, converting a displacement in a length direction of the piezo actuators into a displacement that is vertical with respect to a bottom surface of the base, the motion stage making at least one of a translation motion in the vertical direction, a rotation about a first axis perpendicular to the vertical direction, and a rotation about a second axis perpendicular to both the vertical direction and the first axis, and a control unit controlling the piezo actuators.

REFERENCES:
patent: 6294859 (2001-09-01), Jaenker
patent: 6891601 (2005-05-01), Jeanne et al.
patent: 2005/0231075 (2005-10-01), Xu
patent: 58-12335 (1983-01-01), None
patent: 6-204107 (1994-07-01), None
patent: 7-86377 (1995-03-01), None
patent: 2003-258071 (2003-09-01), None
patent: 10-0396020 (2003-08-01), None

Affiliated with

Also associated with

Rating

Micro position-control system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro position-control system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro position-control system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3810135