Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2002-04-18
2004-09-28
Tamai, Karl (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C360S294400, C369S044160
Reexamination Certificate
active
06798113
ABSTRACT:
FIELD OF THE INVENTION
The present invention generally relates to micro-electro-mechanical devices, and more particularly to a micro-electro-mechanical flexure having an integrally formed actuator for bending the flexure.
BACKGROUND OF THE INVENTION
Micro-electro-mechanical systems (hereinafter “MEMS”) are integrated systems of small size where the feature sizes are generally of micron dimensions. MEMS devices are created on a common silicon substrate utilizing microfabrication technology like that used for integrated circuit (IC) processing. The fabrication processes selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electro-mechanical devices.
One unique feature of MEMS is the extent to which actuation, sensing, control, manipulation, and computation are integrated into the same system. Examples of MEMS devices include individually controlled micro-mirrors used in a projection display, accelerometers that sense a crash condition and activate airbags in cars, pressure sensors, “lab on a chip” systems, and data storage devices.
Many MEMS devices include masses that are moveable within the system. In these MEMS devices, beams or flexures are often used to support the moveable masses in the system. The beams supply both support of the system's mass and compliance for the system's mass movements. If motion of the system's mass must be limited, additional features are generally created in the system to limit the motion as desired. The actual movement of a system's mass is accomplished by yet another device separate from the beams or flexures and motion limiting features. Referred to herein generically as actuators or micro-actuators, various types of devices may be used to cause movement of a system's mass. Micro-actuators which are used in MEMS devices use a variety of methods to achieve actuation: electrostatic, magnetic, piezoelectric, hydraulic and thermal.
In MEMS devices such as those mentioned above, space limitations of the device must be considered. Even though MEMS devices are by definition already extremely small, it may be desired to maximize the size of one component of the device relative to the size of another component or to the size of the entire device. Thus, it would be desirable to reduce the space occupied by such other components of the device, or to eliminate selected components entirely. In addition, it would be desirable to reduce the number of process steps needed to fabricate a particular MEMS device or specific components of a MEMS device. As noted above, MEMS devices are manufactured using micro-fabrication technology like that used in the production of integrated circuits. A reduction or simplification of the process steps required to form a particular MEMS device or one of its components would speed the manufacturing process, and reduce the likelihood of error in the manufacturing process.
SUMMARY OF THE INVENTION
A flexure for a micro-electro-mechanical device includes a longitudinal beam. An actuator integral to the beam acts to flex the beam when activated.
REFERENCES:
patent: 4374402 (1983-02-01), Blessom et al.
patent: 5375033 (1994-12-01), MacDonald
patent: 5563446 (1996-10-01), Chia et al.
patent: 6181531 (2001-01-01), Koshikawa et al.
patent: 6307298 (2001-10-01), O'Brien
patent: 05-076187 (1993-03-01), None
patent: 10-109284 (1998-04-01), None
patent: WO9819304 (1998-05-01), None
Banks, D., “Microsystems, Microsensors & Microactuators: An Introduction”, http://www.dbanks.demon.co.uk/ueng/, Apr. 1999.
How e R.T., Muller R.S., Gabriel K.J., Trimmer W.S.N., “Silicon micromechanics: sensors and actuators on a chip”, IEEE Spectrum, Jul. 1990, pp. 29-35, (1990).
Jaecklin V.P., Linder C., de Rooij N.F., Moret J.M., Bischof R., Rudolf F. “Novel polysilicon comb actuators for xy-stages” Micro Electro Mechanical Systems '92, Travemunde, Germany, Feb. 4-7, pp. 147-149 (1992).
Chan, Dutton, Electrostatic Micromechanical Actuator with Extended Range of Travel (Journal of Microelectromechanical Systems, vol. 9, No. 3, pp. 1-30 (Sept. 2000).
LandOfFree
Flexure with integral electrostatic actuator does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Flexure with integral electrostatic actuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flexure with integral electrostatic actuator will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3198237