Permanent-magnet linear synchronous motor
Piezoelectric microactuator for precise head positioning
Plain surface stage apparatus
Planar direct drive unit comprising a position measuring system
Planar electric motor and positioning device having...
Planar electric motor with dual coil and magnet arrays
Planar motor
Planar motor
Planar motor and stage using the same
Planar motor device, stage unit, exposure apparatus and its...
Planar motor with linear coil arrays
Planar motor with linear coil arrays
Planar pulse motor, exposure apparatus, and device...
Planar stage moving apparatus for machine
Plane motor device with surrounding member surrounding coil...
Platen for flat linear motor
Platen for use with lithographic stages and method of making sam
Platen laminated in mutually perpendicular direction for use wit
Platform positionable in at least three degrees of freedom by in
Polygonal structure of a linear motor with ring winding