Planar stage moving apparatus for machine

Details Planar stage moving apparatus for machine Planar stage moving apparatus for machine

2011-08-30

2011-08-30

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012050, C310S012270

Reexamination Certificate

active

08008815

ABSTRACT:
A planar stage moving apparatus for a machine includes: first to fourth linear motors for applying, between a base, i.e. a fixed body and a table, i.e. a movable body, a movement force to the table, each linear motor including a stator core on which a coil is wound and which is fixed to the base and a mover core to which a permanent magnet is attached and which is fixed to the table; an air bearing unit provided between the base and the table to move the table under the influence of magnet fields when currents are applied to the coils of the linear motors; and a linear encoder installed on one side of the table to measure movement of the table.

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