Platen for use with lithographic stages and method of making sam

Details Platen for use with lithographic stages and method of making sam Platen for use with lithographic stages and method of making sam

1997-08-22

1998-10-27

Laballe, Clayton E.

Electrical generator or motor structure

Dynamoelectric

Linear

29596, H02K 4102, H02K 1502

Patent

active

058281428

ABSTRACT:
A lithographic stage is carried by a platen formed of a plurality of tiles containing a uniformly spaced grid of teeth and having low reluctance and high resistivity. The teeth have been formed by powder metal technology using as powder particles of a ferromagnetic material, the particles being of high resistivity or coated with an insulating material. The space between the teeth is filled with non-magnetic material, such as epoxy, and the entire platen finished such that it has a smooth and uniform flat upper surface.

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