Planar motor and stage using the same

Details Planar motor and stage using the same Planar motor and stage using the same

2011-03-01

2011-03-01

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012060, C310S012150, C310S012170, C310S015000, C355S053000

Reexamination Certificate

active

07898119

ABSTRACT:
A planar motor includes a movable body and a stator configured to drive the movable body in a plane. The stator includes a first stator unit and a second stator unit. The movable body is moved in a first direction by a force acting between the movable body and the first stator unit, and is moved in a second direction by a force acting between the movable body and the second stator unit. The first stator unit and the second stator unit are arranged to face each other in such a manner that the movable body is provided therebetween.

REFERENCES:
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patent: 6891597 (2005-05-01), Sekiguchi
patent: 7133115 (2006-11-01), Nawata et al.
patent: 2002/0018195 (2002-02-01), Iwamoto et al.
patent: 2009/0140582 (2009-06-01), Sato
patent: 07-059332 (1995-03-01), None

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