Planar pulse motor, exposure apparatus, and device...

Details Planar pulse motor, exposure apparatus, and device... Planar pulse motor, exposure apparatus, and device...

2011-07-19

2011-07-19

Hanh, Nguyen N (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

07982344

ABSTRACT:
A planar pulse motor includes a movable element and a stator, wherein the movable element contains a magnetic material, and has a plurality of convex portions on a surface thereof facing the stator. The stator includes a plurality of magnetic field generators to drive the movable element, and each magnetic field generator includes a yoke having a plurality of teeth and a coil which excites the yoke. The planar pulse motor includes a controller which controls rotation of the movable element by energizing magnetic field generators selected from magnetic field generators, whose regions do not include a center line of the movable element along a driving direction of the movable element and do not include portions outside a region facing the movable element, of the plurality of magnetic field generators.

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Korean Office Action dated Nov. 5, 2010, in related corresponding Korean Patent Appln. No. 10-2009-0029908.

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