Electrical generator or motor structure – Dynamoelectric – Linear
Patent
1999-06-18
2000-11-07
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Linear
74471XY, H02K 4100, H01L 2100
Patent
active
061441198
ABSTRACT:
An electric motor comprising a first motor portion having a first magnet array and a first coil array positioned adjacent to the first magnet array and operable to interact with magnetic fields of the first magnet array to move a member, and a second motor portion comprising a second magnet array and a second coil array positioned adjacent to the second magnet array and operable to interact with magnetic fields of the second magnet array to move the member. The first motor portion and the second motor portion are generally parallel to one another and configured for receiving the member therebetween. The motor may be used to position a stage in an exposure apparatus. A method of positioning an object with the motor is also disclosed.
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Jones Judson H.
Nikon Corporation
Ramirez Nestor
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