Electrical generator or motor structure – Dynamoelectric – Linear
Patent
1998-11-16
2000-11-14
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Linear
318135, H02K 4100
Patent
active
061474215
ABSTRACT:
The invention comprises a platform positionable in at least three degrees of freedom at least partly by interaction with coils. The platform includes a support member having a surface. Magnets are attached to the surface and part of a magnet bearing is attached to the support member. Inner and outer platforms are coupled to each other by magnet bearings and interact with coils to position the inner platform in six degrees of freedom. The invention may be particularly useful in precise positioning of semiconductor wafers and materials during photolithography and other processing.
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Hazelton Andrew J.
Novak W. Thomas
Takita Mark K.
Jones Judson H.
Nikon Corporation
Ramirez Nestor
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